Description:Thirteen papers provide the latest concepts and metrology of the Gate Dielectric Integrity (GDI) and its applications for the material and device process and tool qualification. The wide variety of topics covered includes: concepts, methods, protocols and reliability, and assessment as related to dielectric integrity. The characterization of thin dielectrics, various GDI measurements techniques, and discussion of important effects on the characterization of GDI is also included. Until now, such information has never been available in a single book on GDI. This publication will benefit process engineers, fab technologists, quality and reliability engineers, silicon material scientists, materials characterization analysts, research scholars and device engineers.We have made it easy for you to find a PDF Ebooks without any digging. And by having access to our ebooks online or by storing it on your computer, you have convenient answers with Gate Dielectric Integrity: Material, Process, and Tool Qualification (Astm Special Technical Publication// Stp). To get started finding Gate Dielectric Integrity: Material, Process, and Tool Qualification (Astm Special Technical Publication// Stp), you are right to find our website which has a comprehensive collection of manuals listed. Our library is the biggest of these that have literally hundreds of thousands of different products represented.
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ISBN
0803126158
Gate Dielectric Integrity: Material, Process, and Tool Qualification (Astm Special Technical Publication// Stp)
Description: Thirteen papers provide the latest concepts and metrology of the Gate Dielectric Integrity (GDI) and its applications for the material and device process and tool qualification. The wide variety of topics covered includes: concepts, methods, protocols and reliability, and assessment as related to dielectric integrity. The characterization of thin dielectrics, various GDI measurements techniques, and discussion of important effects on the characterization of GDI is also included. Until now, such information has never been available in a single book on GDI. This publication will benefit process engineers, fab technologists, quality and reliability engineers, silicon material scientists, materials characterization analysts, research scholars and device engineers.We have made it easy for you to find a PDF Ebooks without any digging. And by having access to our ebooks online or by storing it on your computer, you have convenient answers with Gate Dielectric Integrity: Material, Process, and Tool Qualification (Astm Special Technical Publication// Stp). To get started finding Gate Dielectric Integrity: Material, Process, and Tool Qualification (Astm Special Technical Publication// Stp), you are right to find our website which has a comprehensive collection of manuals listed. Our library is the biggest of these that have literally hundreds of thousands of different products represented.