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Analysis and Design Principles of Mems Devices

Minhang Bao

4.9/5 (25417 ratings)

Description:Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, "Analysis and Design Principles of MEMS Devices" is a suitable source of reference for researchers and engineers in the field. It presents the analysis and design principles of MEMS devices more systematically than ever before.; It includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures. A problem section is also included at the end of each chapter with answers provided at the end of the book.We have made it easy for you to find a PDF Ebooks without any digging. And by having access to our ebooks online or by storing it on your computer, you have convenient answers with Analysis and Design Principles of Mems Devices. To get started finding Analysis and Design Principles of Mems Devices, you are right to find our website which has a comprehensive collection of manuals listed.
Our library is the biggest of these that have literally hundreds of thousands of different products represented.

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ISBN: 008045562X

Description: Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, "Analysis and Design Principles of MEMS Devices" is a suitable source of reference for researchers and engineers in the field. It presents the analysis and design principles of MEMS devices more systematically than ever before.; It includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures. A problem section is also included at the end of each chapter with answers provided at the end of the book.We have made it easy for you to find a PDF Ebooks without any digging. And by having access to our ebooks online or by storing it on your computer, you have convenient answers with Analysis and Design Principles of Mems Devices. To get started finding Analysis and Design Principles of Mems Devices, you are right to find our website which has a comprehensive collection of manuals listed.
Our library is the biggest of these that have literally hundreds of thousands of different products represented.

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Analysis and Design Principles of Mems Devices

Analysis and Design Principles of Mems Devices

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